Employing innovations in RF measurements, Keithley Instruments' third-generation on-wafer RF option is designed for semiconductor parametric production process control. With the ability to offer continuous, automatic, real-time monitoring of measurement quality, it provides high-quality results with the highest throughput, lowest cost of operation, and easiest use of any competitive product, claimed Keithley. In addition, Keithley's RF option measurement capability is qualified for parametric process control by 200 mm and 300 mm production fabs worldwide for applications involving high-performance logic and high-performance analog IC production, according to the developer.

By having the tester automatically detect events that would invalidate the RF calibration, and automatically trigger corrective action such as an unattended recalibration, the tester ensures continuous monitoring of measurement integrity.

The RF option, with the Model S680 SimulTest option, and appropriately designed test structures and probe cards, is the only RF test system on the market that can make simultaneous dc and RF measurements in parallel within the same probe touchdown. This yields substantially higher throughput than similar methods that perform sequential dc measurements followed by RF measurements. Furthermore, RF parameters can be extracted and de-embedded for the first time in real time from measured S-parameters using the industry's largest RF parametric extraction library without the need for post processing, saving time and increasing throughput.

In addition, combined with the Model S680 parametric test system, the RF option has a direct-dock capability for making measurements at 40 GHz. Automated probe-card changes also increase measurement integrity by eliminating major variability caused by human intervention, in system-to-system variation in RF measurement results. And, because an RF specialist is no longer needed, it lowers the cost of operation.

Likewise, the SofTouch option maximizes probe-card lifetime by minimizing probe overdrive while meeting measured quality criteria for probe contact.

Keithley's 40 GHz RF option solution works with a fab's existing automated dc production probers. This reduces initial acquisition costs by as much as two-thirds and lowers maintenance and operator costs as compared to other offerings that require purchasing a specialized RF prober.

Operational costs are also decreased significantly because dc and RF tests can be run in single-insertion mode on the same equipment, eliminating the need to move wafer lots between a dc-only tester and an RF-only tester.

For more information, visit www.keithley.com.